JPH0125475Y2 - - Google Patents

Info

Publication number
JPH0125475Y2
JPH0125475Y2 JP1983194803U JP19480383U JPH0125475Y2 JP H0125475 Y2 JPH0125475 Y2 JP H0125475Y2 JP 1983194803 U JP1983194803 U JP 1983194803U JP 19480383 U JP19480383 U JP 19480383U JP H0125475 Y2 JPH0125475 Y2 JP H0125475Y2
Authority
JP
Japan
Prior art keywords
movable plate
vacuum
sample stage
micrometer head
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983194803U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60101369U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19480383U priority Critical patent/JPS60101369U/ja
Publication of JPS60101369U publication Critical patent/JPS60101369U/ja
Application granted granted Critical
Publication of JPH0125475Y2 publication Critical patent/JPH0125475Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP19480383U 1983-12-16 1983-12-16 電子線装置等用試料装置 Granted JPS60101369U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19480383U JPS60101369U (ja) 1983-12-16 1983-12-16 電子線装置等用試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19480383U JPS60101369U (ja) 1983-12-16 1983-12-16 電子線装置等用試料装置

Publications (2)

Publication Number Publication Date
JPS60101369U JPS60101369U (ja) 1985-07-10
JPH0125475Y2 true JPH0125475Y2 (en]) 1989-07-31

Family

ID=30418600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19480383U Granted JPS60101369U (ja) 1983-12-16 1983-12-16 電子線装置等用試料装置

Country Status (1)

Country Link
JP (1) JPS60101369U (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5462658U (en]) * 1977-10-12 1979-05-02

Also Published As

Publication number Publication date
JPS60101369U (ja) 1985-07-10

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